Azbil Launches New Sapphire Capacitive Diaphragm Gauge Using MEMS Processing Technology for Enhanced Deposition Resistance

Tokyo-(Business Wire)–Azbil Corporation (Tokyo: 6845) announced that its Model V8 sapphire capacitive diaphragm vacuum gauge, which uses MEMS*1 Processing technology to enhance deposition resistance*2 on the sensor.

As part of the continued evolution of semiconductor manufacturing, front-end thin film deposition and etch processes now use a wider variety of gases. Depending on the process gas used, thin film deposits can form on the sensor diaphragm of vacuum gauges used in these processes, causing their zero point to shift. This shift has caused operators of thin-film deposition and etch equipment to adjust vacuum gauges more frequently, disrupting manufacturing schedules.

Azbil has developed products in the past to address this problem, which continues to occur with the introduction of new gases. In search of a better solution, Azbil completely redesigned the existing sapphire capacitor diaphragm vacuum gauge and introduced the V8 sensor, which has a completely new structure, flow path, etc. MEMS technology is used to roughen the surface of the sensor chip, which helps break down the thin film deposited on the sensor diaphragm.pressure*3 The balance is better now (also in models that are an improved version of the flat sensor used in existing gauges), making the diaphragm surface less likely to bend. Therefore, the amount of zero point shift due to thin film deposition in the V8 type has been drastically reduced to one-tenth of that of the existing SPG type.

Type V8S has a control unit separate from the measuring head, allowing use at temperatures up to 250 °C.This high temperature environment is often found in atomic layer deposition (ALD)*4 Equipment due to process gas changes.


  • Higher resistance to deposits on the sensor

    With MEMS technology, the zero point offset due to thin film deposits formed on the sensor has been reduced to one-tenth of that of the SPG type.

  • Temperature resistant up to 250 °C

    In response to changes in the process gas, the model V8S (separate type) for high temperature has been added.

  • Compact size and smaller footprint

    By more efficiently arranging the components inside the product, its volume has been reduced by 40% compared to model SPG.

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Under the guidance of the Azbil Group’s “Human-Centered Automation” concept, Azbil aims to make a “serial” contribution to a sustainable society and ensure its own sustainable development. It provides solutions to production site problems that meet customer needs.

*1 microelectromechanical systems. Various devices or systems such as sensors that integrate tiny electrical and mechanical components on a single chip.

*2 In semiconductor manufacturing, this refers to the film-forming process that produces thin films.

*3 The force generated inside a component when an external force is applied to the component.

*4 A thin film deposition technique used in a vacuum.

About Azbil

Azbil Corporation, formerly Yamatake Corporation, is a leader in construction and industrial automation, using its measurement and control technologies to provide customers with high value-added solutions that make their operations more efficient and sustainable. Founded in 1906, Azbil serves customers in a wide variety of industries around the world, with the aim of contributing to the safety, comfort and fulfillment of people and the protection of the global environment. As of the end of March 2022, Azbil employs more than 10,000 people worldwide and generates revenue of 256 billion yen.

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